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Evaluation of the sp 3 /sp 2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap
Carbon Letters ( IF 4.5 ) Pub Date : 2020-11-02 , DOI: 10.1007/s42823-020-00199-x
Hongxun Sheng , Wenwen Xiong , Songsheng Zheng , Chao Chen , Song He , Qijin Cheng

DLC has been attractive as semiconductor materials for solar cell due to its biological friendliness, flexible microstructures, and especially its tunable band gap. In order to fabricate high-efficiency multiband gap solar cell, it is important to control the sp3/ sp2 bonds ratio of DLC film corresponding to optical band gap (Eg). There are many references reporting the relations among the fabrication conditions, Eg, sp3/sp2, and ID/IG. However, a more comprehensive database is needed for controllable fabrication. Especially, the quantitative relationship of sp3/sp2 ratio to Eg of DLC film by PECVD is unclear. In this paper, 36 sets of DLC films were fabricated by RF-PECVD. Characterization methods of XPS, Raman spectroscopy, and IR absorption have been used to determine the sp3/sp2 ratio of DLC films. UV/visible light absorption method has applied to evaluate Eg. The Eg obtained is in the range 1.45–3.0 eV. Our results agree well with the references. The XPS spectra gives a linear relationship as Eg = − 0.161 (± 0.136) + 26.095 (± 1.704) · {sp3(XPS)/sp2}, the Raman spectra shows a linear function that Eg = 1.327 (± 0.046) + 0.428 (± 0.036) · (ID/IG), as well as the FTIR analysis demonstrates that Eg = − 0.492 (± 0.093) + 0.464 (± 0.044) · {sp3(FTIR)/sp2}.



中文翻译:

RF-PECVD法评估DLC薄膜的sp 3 / sp 2比值及其与光带隙的定量关系

DLC由于其生物友好性,灵活的微结构,尤其是其可调带隙,已成为太阳能电池的半导体材料。为了制造高效的多带隙太阳能电池,重要的是控制与光学带隙(E g)相对应的DLC膜的sp 3 / sp 2键比。有许多文献报告制作条件之间的关系,ē,SP 3 / SP 2,和我d / I g ^。但是,需要更全面的数据库来控制制造。特别是sp 3 / sp 2的定量关系PECVD对DLC膜的E g的比值尚不清楚。本文通过RF-PECVD法制备了36套DLC薄膜。XPS,拉曼光谱和红外吸收的表征方法已用于确定DLC膜的sp 3 / sp 2比。紫外/可见光吸收法已经应用于评估E g。获得的E g在1.45–3.0 eV的范围内。我们的结果与参考文献非常吻合。XPS谱图给出了作为线性关系ë = - 0.161(±0.136)+ 26.095(±1.704)·{SP 3 (XPS) / SP 2 },拉曼光谱示出了线性函数Ëg  = 1.327(±0.046)+ 0.428(±0.036)·(I D / I G),并且FTIR分析表明E g  = − 0.492(±0.093)+ 0.464(±0.044)·{sp 3 ( FTIR) / sp 2 }。

更新日期:2020-11-02
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