Transparent conducting aluminum-doped ZnO thin films have been prepared by nebulizer spray pyrolysis technique for different doping concentrations on glass substrates. X-ray diffraction patterns reveal that all the films are polycrystalline of hexagonal structure with c–axis orientations. Atomic force microscopy (AFM) images noticed that the films have a uniform surface morphology consist spike shaped particles and low surface roughness. The optical transmittance in visible region was escalated from 85 to 93% and optical band gap of thin films is also improved from 3.27 to 3.37 eV. Photoluminescence spectra show mainly five emissions peaks and a blue shift observed in UV emission peak. Hall Effect measurements show that the prepared films having n-type conductivity with low resistivity and high carrier concentrations.

中文翻译：

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铝掺杂对雾化器喷雾热解技术制备的c轴取向氧化锌纳米薄膜微观结构、光学和电学性能的影响

通过雾化器喷雾热解技术在玻璃基板上制备了不同掺杂浓度的透明导电铝掺杂ZnO薄膜。X 射线衍射图表明所有薄膜都是 c 轴取向的六方结构多晶。原子力显微镜 (AFM) 图像注意到薄膜具有均匀的表面形态，由尖峰状颗粒和低表面粗糙度组成。可见光区的透光率从 85% 提高到 93%，薄膜的光学带隙也从 3.27 eV 提高到 3.37 eV。光致发光光谱主要显示五个发射峰和在紫外发射峰中观察到的蓝移。霍尔效应测量表明，制备的薄膜具有 n 型导电性、低电阻率和高载流子浓度。