Hydrogenated diamond-like carbon (DLC) films were deposited by DC-pulse plasma-enhanced chemical vapor deposition (PECVD) under the different electrode distances. Effects of the electrode distances on the microstructural, mechanical, and tribological properties of the obtained films were investigated by high-resolution transmission electron microscopy (HRTEM), selected area electron diffraction (SAED), Raman spectrum, Fourier transform infrared spectroscopy (FTIR), nano-indenter, and reciprocating ball-on-disc tester, respectively. The results indicate that the thickness of the films decreased with the increased electrodes distances. The films have the highest internal stress, highest hydrogen concentration, and lowest friction coefficient at the 54[Formula: see text]mm electrode distance, which are resulted from the highest sp3 content formed at this feature distance. The wear rates also have similar variations. The film formed at 54[Formula: see text]mm distance also shows the lowest hardness and elastic modulus with values of 6.2 and 29.1[Formula: see text]GPa.

中文翻译：

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电极距离对直流脉冲 PECVD 沉积氢化 DLC 薄膜的机械和摩擦学性能的影响

通过直流脉冲等离子体增强化学气相沉积 (PECVD) 在不同电极距离下沉积氢化类金刚石碳 (DLC) 薄膜。通过高分辨率透射电子显微镜 (HRTEM)、选区电子衍射 (SAED)、拉曼光谱、傅里叶变换红外光谱 (FTIR)、分别是纳米压头和往复式球盘测试仪。结果表明，薄膜的厚度随着电极距离的增加而减小。薄膜在 54[公式：见正文]mm 电极距离处具有最高的内应力、最高的氢浓度和最低的摩擦系数，这是由最高 sp3在此特征距离处形成的内容。磨损率也有类似的变化。在54[公式：见正文]mm距离处形成的膜也显示出最低的硬度和弹性模量，值为6.2和29.1[公式：见正文]GPa。