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Development and optical characterization of an atmospheric pressure non-thermal plasma jet for superhydrophobic surface fabrication
Plasma Research Express Pub Date : 2020-10-28 , DOI: 10.1088/2516-1067/abbe9b
Rakesh Ruchel Khanikar , Palash Jyoti Boruah , H Bailung

Atmospheric pressure non-thermal plasma jets are becoming subject of great attention in various fields such as plasma processing and biomedical applications due to their ability to produce highly reactive species and good reaction chemistry at low gas temperatures. In the present study, a non-thermal plasma jet operating on argon gas at atmospheric pressure aimed mainly towards surface modification and thin film deposition applications has been developed. Optical emission spectroscopy is used to evaluate the plasma parameters. The gas temperature (800 ± 50 K) is estimated from OH(A-X) rotational band. The excitation temperature is measured using intensity ratio of two argon lines and is found to be 0.241–0.273 eV and the corresponding electron temperatures have been measured. Electron density of the order of 10 14 cm −3 has been obtained from the Stark broadening of Balmer H β line. The plasma jet has been successfully employed to deposit a...

中文翻译:

用于超疏水表面制造的常压非热等离子体射流的开发和光学特性

大气压非热等离子体射流由于能够在低气体温度下产生高反应性物质和良好的反应化学性能而在诸如等离子体处理和生物医学应用等各个领域中引起极大关注。在本研究中,已经开发了一种在大气压下以氩气为主要工作对象的非热等离子体射流,该射流主要用于表面改性和薄膜沉积应用。发射光谱用于评估等离子体参数。气体温度(800±50 K)由OH(AX)旋转带估算得出。使用两条氩线的强度比测量激发温度,发现激发温度为0.241–0.273 eV,并且已经测量了相应的电子温度。从巴尔默Hβ线的斯塔克加宽获得了大约10 14 cm -3的电子密度。等离子射流已成功用于沉积...
更新日期:2020-10-30
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