The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

中文翻译：

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LaserFIB：在集成第二腔室中将高性能 FIB-SEM 与飞秒激光加工相结合的新应用机会

飞秒激光器（fs 激光器）的发展能够提供极快速的材料无热烧蚀，引发了材料科学的复兴。飞秒激光的样品铣削速率比目前使用的传统聚焦离子束 (FIB) 源大几个数量级。结合最低的表面后处理要求，该技术被证明是材料研究的游戏规则改变者。与聚焦离子束扫描电子显微镜 (LaserFIB) 连接的飞秒激光器的开发实现了许多新功能，包括进入深埋结构以及生产极大的沟槽、横截面、支柱和 TEM H 型钢，所有这些同时保留微观结构并避免或减少 FIB 抛光。由于这项技术在晶体学、电子、机械工程、电池研究和材料样品制备领域中的一些高影响应用现在成为可能。本文总结了这项新技术当前的机遇，重点关注工程材料、能源材料和电子材料的材料科学大趋势。