Elastic properties of TaN films on (001)Si are investigated by surface Brillouin scattering (SBS). The velocity dispersion is obtained from Brillouin frequency shifts and surface acoustic wave phase velocities derived from measured SBS spectra. The observed Rayleigh surface acoustic and Sezawa waves indicate a soft on hard configuration. The elastic stiffnesses from the best fit of the calculated and measured spectra were ${C_{11}} = 288$ and ${C_{44}} = 80\;{\rm{GPa}}$. Using these elastic constants in the surface elastodynamic Green’s function yielded theoretical Brillouin spectra in agreement with measured spectra. Employing a least squares fitting procedure to the elastic constants gives uncertainties in ${C_{11}}$ and ${C_{44}}$ as ${\pm}{3.7}$ and ${\pm}{2.5}\;{\rm{GPa}}$, respectively.

中文翻译：

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氮化钽（TaN）薄膜的表面布里渊散射研究

通过表面布里渊散射（SBS）研究了（001）Si上TaN薄膜的弹性性能。速度色散是从布里渊频移和表面声波相速度获得的，而表面声波相速度是从测量的SBS光谱中得出的。观察到的瑞利表面声波和Sezawa波表示硬配置上的软。来自计算和测量的光谱的最佳拟合的弹性刚度为$ {C_ {11}} = 288 $和$ {C_ {44}} = 80 \; {\ rm {GPa}} $。在表面弹性动力学格林函数中使用这些弹性常数可以得到与测量光谱一致的理论布里渊光谱。对弹性常数采用最小二乘拟合程序可得出$ {C_ {11}} $和$ {C_ {44}} $的不确定性分别为$ {\ pm} {3.7} $和$ {\ pm} {2.5} \; {\ rm {GPa}} $。