Modulating the soft magnetic properties of amorphous magnetic thin films is important for constructing energy-efficient and high performance thin film inductors. Here, a metal (Pt) and an oxide (Al2O3) are selected as the covering layer to investigate the effect of the interfacial microstructure on the magnetic properties of CoZrTa thin films. The results show that the magnetic dead layer thickness (tDL) and coercivity (Hc) decrease and saturation magnetization (Ms) increases with the annealing temperature for the CoZrTa/Al2O3 sample. However, tDL, Hc, and Ms of the CoZrTa/Pt sample show an opposite variation tendency with the annealing temperature. Interfacial structural results indicate that different magnetisms can be ascribed to different interfacial oxygen migration and interfacial diffusion processes. The effective interfacial oxygen migration in CoZrTa/Al2O3 reconstructs oxygen atom distribution at the interface and provides an effective way to enhance the magnetic properties of CoZrTa, whereas the intensified interfacial diffusion between CoZrTa and Pt after annealing in the CoZrTa/Pt sample caused the deterioration of the magnetism. This study will be helpful in advancing the development of magnetic thin film inductor devices.

中文翻译：

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通过界面氧迁移调整溅射非晶 CoZrTa/金属氧化物 (MO) 的磁性能

调制非晶磁性薄膜的软磁特性对于构建节能和高性能的薄膜电感器非常重要。在这里，选择金属（Pt）和氧化物（Al2O3）作为覆盖层，以研究界面微结构对 CoZrTa 薄膜磁性能的影响。结果表明，CoZrTa/Al2O3 样品的磁性死层厚度 (tDL) 和矫顽力 (Hc) 降低，饱和磁化强度 (Ms) 随退火温度升高。然而，CoZrTa/Pt 样品的 tDL、Hc 和 Ms 显示出与退火温度相反的变化趋势。界面结构结果表明，不同的磁性可归因于不同的界面氧迁移和界面扩散过程。CoZrTa/Al2O3 中有效的界面氧迁移重构了界面处的氧原子分布，为增强 CoZrTa 的磁性能提供了有效途径，而在 CoZrTa/Pt 样品中退火后 CoZrTa 和 Pt 之间的界面扩散加剧导致其性能恶化。磁性。该研究将有助于推动磁性薄膜电感器件的发展。