We relate the photochromic response of rare-earth oxyhydride thin films (YHO, NdHO, GdHO and DyHO) synthesized by reactive magnetron sputtering to chemical composition. Depth profiles of the sample composition are extracted by a multi-method ion beam analysis approach. The total areal density of the thin films is deduced from Rutherford Backscattering Spectrometry while coincidence Time-of-Flight/Energy Elastic Recoil Detection Analysis provides depth-profiles of the film constituents. High-resolution depth profiles of the concentration of light species, i.e. hydrogen and oxygen, are additionally extracted from Nuclear Reaction Analysis and Elastic Backscattering Spectrometry, respectively. The photochromic response of the films is measured by optical transmission spectroscopy before and after illumination. We report photochromic properties for YHO, NdHO, GdHO and DyHO for chemical compositions described by the formula REH_2−δO_δ in the range of 0.45 < δ < 1.5.

我们将反应磁控溅射合成的稀土氧化物氢化物薄膜（YHO，NdHO，GdHO和DyHO）的光致变色响应与化学成分相关。通过多方法离子束分析方法提取样品组合物的深度轮廓。薄膜的总面密度由卢瑟福反向散射光谱法推导出，而飞行时间/能量弹性反冲检测分析的重合则提供了薄膜成分的深度分布。分别从核反应分析和弹性背散射光谱法中分别提取了轻物质，即氢和氧的浓度的高分辨率深度剖面。在照射之前和之后，通过光学透射光谱法测量膜的光致变色响应。_2-δ Ö _δ 0.45 <δ<1.5的范围内。