Abstract

In contrast to traditional methods for obtaining planar superconducting structures based on YBCO films, in which the topology is formed by etching or ion implantation, the topology in the master mask (MM) method is set at the initial stage of structure preparation, during the MM formation, and the YBCO deposition is the final stage. The superconducting elements of the structure are formed in MM windows, and insulating regions appear between them. Having fixed the topology of superconducting bridges at the MM formation stage, we measured their characteristics depending on the YBCO film thickness, performing deposition cycles sequentially. After each YBCO deposition cycle, we measured the structure parameters of the film as well as the critical temperature and current in the bridges, including the bridges with the Josephson junctions formed on a bicrystal substrate.

中文翻译：

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基于超导膜厚度的平面HTSC结构特性分析中主掩模法的可能性

摘要

与通过蚀刻或离子注入形成拓扑的基于YBCO膜的获得平面超导结构的传统方法相反，在掩模过程中，主掩模（MM）方法中的拓扑设置在结构准备的初始阶段形成，YBCO沉积是最后阶段。结构的超导元件形成在MM窗口中，并且在它们之间出现绝缘区域。在MM形成阶段固定了超导桥的拓扑之后，我们根据YBCO膜厚度测量了它们的特性，依次执行沉积循环。在每个YBCO沉积循环之后，我们测量了薄膜的结构参数以及桥中的临界温度和电流，