Spatial light modulators are essential optical elements in applications that require the ability to regulate the amplitude, phase and polarization of light, such as digital holography, optical communications and biomedical imaging. With the push towards miniaturization of optical components, static metasurfaces are used as competent alternatives. These evolved to active metasurfaces in which light-wavefront manipulation can be done in a time-dependent fashion. The active metasurfaces reported so far, however, still show incomplete phase modulation (below 360°). Here we present an all-solid-state, electrically tunable and reflective metasurface array that can generate a specific phase or a continuous sweep between 0 and 360° at an estimated rate of 5.4 MHz while independently adjusting the amplitude. The metasurface features 550 individually addressable nanoresonators in a 250 × 250 μm² area with no micromechanical elements or liquid crystals. A key feature of our design is the presence of two independent control parameters (top and bottom gate voltages) in each nanoresonator, which are used to adjust the real and imaginary parts of the reflection coefficient independently. To demonstrate this array’s use in light detection and ranging, we performed a three-dimensional depth scan of an emulated street scene that consisted of a model car and a human figure up to a distance of 4.7 m.

空间光调制器是需要能够调节光的振幅、相位和偏振的应用中必不可少的光学元件，例如数字全息术、光通信和生物医学成像。随着光学元件小型化的推进，静态超表面被用作有效的替代品。这些进化为活性超表面，其中可以以时间相关的方式进行光波前操作。然而，到目前为止报道的有源超表面仍然显示出不完整的相位调制（低于 360°）。在这里，我们提出了一个全固态、电可调和反射超表面阵列，它可以在独立调整振幅的同时以估计的 5.4 MHz 的速率生成特定相位或 0 到 360° 之间的连续扫描。²没有微机械元件或液晶的区域。我们设计的一个关键特征是每个纳米谐振器中存在两个独立的控制参数（顶栅电压和底栅电压），用于独立调整反射系数的实部和虚部。为了演示该阵列在光检测和测距中的用途，我们对模拟街景进行了三维深度扫描，该场景由一辆模型汽车和一个距离最远 4.7 m 的人物组成。