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Nanostructural and Electrical Properties of Al/Sn/La 2 O 3 Nanocomposite as a Gate Dielectric of MOSFETs
Proceedings of the National Academy of Sciences, India Section A: Physical Sciences ( IF 0.9 ) Pub Date : 2019-07-27 , DOI: 10.1007/s40010-019-00637-0
Masoud Ebrahimzadeh , Mehrnoush Nakhaei , Mansoure Padam , Ali Bahari

Metal–oxide–semiconductor field-effect transistors (MOSFETs) have significant role on producing the electronic devices. The producers try to make the chips in smaller size so they need materials with high dielectric constant. Here, in this research, Al/Sn/La2O3 will introduce as a material with higher dielectric constant and less defections. In this research, Al/Sn/La2O3 nanostructure was prepared by sol–gel and spin-coating methods. Lanthanum chloride (LaCl3·7H2O), cetyltrimethylammonium bromide, ammonia (25%), aluminum tri-sec-butylate (C12H27AlO3), acetyl acetone (C2H5O8), isopropyl alcohol (C3H8O), Tin (II) chloride (SnCl2) and H2O were used to synthesize Al/Sn/La2O3. Structural properties and surface morphology of nanocrystallites were investigated by X-ray diffraction, differential scanning calorimetry, scanning electron microscopy, atomic force microscopy and Fourier-transform infrared radiation, respectively. Electrical properties were determined with metal–dielectric–semiconductor through capacitance–voltage (C–V), the hysteresis curve and current density–voltage (JV). The conduction mechanism was measured in the temperature range of 330 K < T < 410 K and in the electrical field < 0.12 MV cm−1, and the results showed ohmic emission. A thermal excited model was proposed to explain the mechanism of ohmic conduction current. The highest value of dielectric constant (k) for Al/Sn/La2O3 structure was 33 at T = 250 °C with almost amorphous structure. The result showed that \( \frac{{I_{\text{on}} }}{{I_{\text{off}} }} \) of Al/Sn/La2O3 structure was ~ 1.3. The leakage current and capacitance–voltage of Al/Sn/La2O3 nanocomposite for the sample calcined at T = 250 °C showed that this sample can be good enough for using as a gate dielectric of MOSFETs.



中文翻译:

Al / Sn / La 2 O 3纳米复合材料作为MOSFET栅极介电材料的纳米结构和电学性质

金属氧化物半导体场效应晶体管(MOSFET)在生产电子设备方面起着重要作用。生产商试图使芯片尺寸更小,因此他们需要具有高介电常数的材料。这里,在这项研究中,将引入Al / Sn / La 2 O 3作为具有较高介电常数和较少缺陷的材料。在这项研究中,通过溶胶-凝胶法和旋涂法制备了Al / Sn / La 2 O 3纳米结构。氯化镧(LaCl 3 ·7H 2 O),十六烷基三甲基溴化铵,氨(25%),三仲丁酸铝(C 12 H 27 AlO 3),乙酰丙酮(C 2 H5 O 8),异丙醇(C 3 H 8 O),氯化锡(II)(SnCl 2)和H 2 O用于合成Al / Sn / La 2 O 3。分别通过X射线衍射,差示扫描量热法,扫描电子显微镜,原子力显微镜和傅立叶变换红外辐射研究了纳米微晶的结构性质和表面形态。电性能是通过电容-电压(具有金属-电介质-半导体确定C-V )时,磁滞曲线和电流密度-电压(Ĵ - V)。在330 K < T  <410 K的温度范围内和在<0.12 MV cm -1的电场下测量导电机理 ,结果显示为欧姆发射。提出了一种热激励模型来解释欧姆传导电流的机理。Al / Sn / La 2 O 3结构的最高介电常数(k)在T  = 250°C时几乎为非晶结构,为33 。结果表明,Al / Sn / La 2 O 3结构的\(\ frac {{I _ {\ text {on}}}} {{I _ {\ text {off}}}}} \)为〜1.3。Al / Sn / La 2 O 3的泄漏电流和电容-电压T  = 250°C下煅烧的样品的纳米复合材料表明,该样品足以用作MOSFET的栅极电介质。

更新日期:2019-07-27
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