In this study, type Ib, type IIa, and type IIb synthetic diamonds tools were used for the ultra-precision machining (UPM) of copper. Raman spectroscopy showed that the diamond cutting tools used in these experiments exhibited high-quality sp3 structure and little residual stress in the diamond lattice. Type IIb diamond cutting tools showed higher durability and better UPM performance than the other types of diamond cutting tools. Chemical wear was deemed significant with respect to the cutting tools’ wear in this UPM experiment. Higher durability and enhanced UPM performance could be attributed to the higher thermal and chemical stabilities of the type IIb diamond cutting tool.

中文翻译：

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合成金刚石刀具在铜超精密加工中的切削性能研究

在这项研究中，Ib 型、IIa 型和 IIb 型合成金刚石工具用于铜的超精密加工 (UPM)。拉曼光谱表明，这些实验中使用的金刚石切削工具表现出高质量的 sp3金刚石晶格中的结构和残余应力很小。IIb 型金刚石刀具与其他类型的金刚石刀具相比，具有更高的耐用性和更好的 UPM 性能。在 UPM 实验中，化学磨损被认为是对切削工具磨损的显着影响。更高的耐用性和增强的 UPM 性能可归因于 IIb 型金刚石切削工具更高的热稳定性和化学稳定性。