This paper proposes a novel readout interface for a high-precision silicon MEMS vibratory gyroscope. The readout interface contains a closed-loop self-resonating driving circuit and a low-noise open-loop capacitance sensing circuit. In order to achieve an overall optimization in noise performance, the noise in driving loop of the interface is analyzed in detail. After the noise optimization, the driving frequency stability achieves 0.93 ppm, the front-end capacitance resolution achieves 0.002 aF/[Formula: see text]. The total zero bias instability achieves 3.82[Formula: see text]/h, and angle random walk (ARW) achieves 0.014[Formula: see text]/s/[Formula: see text].

中文翻译：

---

一种用于硅 MEMS 振动陀螺仪的低噪声读出接口

本文提出了一种用于高精度硅 MEMS 振动陀螺仪的新型读出接口。读出接口包含闭环自谐振驱动电路和低噪声开环电容传感电路。为实现噪声性能的整体优化，对接口驱动回路的噪声进行了详细分析。噪声优化后，驱动频率稳定性达到0.93 ppm，前端电容分辨率达到0.002 aF/[公式：见正文]。总零偏差不稳定性达到 3.82[公式：见文]/h，角度随机游走 (ARW) 达到 0.014[公式：见文]/s/[公式：见文]。