Abstract In this paper, an absolute position-distance measurement based method for simultaneous measurement of six-degree-of-freedom (6DOF) errors of a precision rotary stage is proposed. This method uses the multi-wavelength phase-shifting interferometry technology and high-speed CCD camera to measure the instantaneous absolute spatial posture of the specially designed micro structure feature following the movement of a measured rotary stage. By analyzing the spatial posture of a series of instantaneous micro structure features, the 6DOF errors of the precision rotary stage are separated. The simultaneous, high precision and dynamically continuous measurement of 6DOF errors of the precision rotary stage is achieved. To improve the accuracy of error analysis, a model of 6DOF errors of the precision rotary stage is established to determine the mapping relationship between the 6DOF errors and the spatial posture of the micro structure feature. A test platform for 6DOF geometric motion errors of the precision rotary stage is built. The measurement results demonstrate the effectiveness and accuracy of the proposed method.

中文翻译：

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一种基于绝对位置距离测量的精密旋转平台6DOF几何运动误差同时测量方法

摘要 本文提出了一种基于绝对位置距离测量的精密旋转平台六自由度(6DOF)误差同时测量方法。该方法利用多波长移相干涉测量技术和高速CCD相机来测量随被测旋转台运动而特殊设计的微结构特征的瞬时绝对空间姿态。通过分析一系列瞬时微观结构特征的空间姿态，分离精密旋转平台的6DOF误差。实现了精密旋转平台6DOF误差的同步、高精度、动态连续测量。为了提高误差分析的准确性，建立精密旋转平台6DOF误差模型，确定6DOF误差与微结构特征空间姿态的映射关系。搭建了精密旋转平台6DOF几何运动误差测试平台。测量结果证明了所提出方法的有效性和准确性。