For a vibration system, the best designed spring is compliant to a desired vibration mode while it is robust to other undesired modes. There are several types of spring design for displacing the proofmass along the x and y axes, however, very few designs of spring compliant to the z axis are introduced. Therefore, we propose a z axis microactuator in which the suspending spring is designed so that it is only compliant to vibration along the z axis. The suspending spring consists of straight beam stages mechanically coupled with each other via frames which are symmetrically designed around a center plate. The operation characteristics of the microactuator is investigated by theoretical expresses and numerical simulation. The frequency split between the z axis mode and undesired modes can obtain more than 45%. The operation frequency can be modified in a wide range, from 68 kHz to 400 kHz, by changing the dimensional parameters of spring beams. The spring beams can be lengthened to increase displacement in the z axis while the mode cross-talk is still suppressed. Compared to the previously reported researches, the current microactuator shows robustness to undesired vibration modes, which is potential for integration in low mode cross-talk multi-axis micro-stages and low-noise mechanical sensors.

对于振动系统，最佳设计的弹簧可以适应所需的振动模式，同时对其他不良模式也很坚固。有多种类型的弹簧设计用于沿x和y轴移动质量，但是，很少引入与z轴兼容的弹簧设计。因此，我们提出一种z轴微致动器，其中设计了悬挂弹簧，使其仅顺应于沿z轴的振动。悬挂弹簧由直梁台组成，这些直梁台通过围绕中心板对称设计的框架相互机械耦合。通过理论计算和数值模拟研究了微执行器的工作特性。在z轴模式和不期望的模式之间的频率分割可以获得超过45％。通过更改弹簧梁的尺寸参数，可以在68 kHz至400 kHz的宽范围内修改工作频率。弹簧梁可以加长以增加在z轴上的位移，同时仍然可以抑制模式串扰。与先前报道的研究相比，当前的微执行器表现出对不希望的振动模式的鲁棒性，这可能集成在低模串扰多轴微位移台和低噪声机械传感器中。