With the arrival of the internet of things (IoTs) era, inertial sensors are considered to be essential components for inertial navigation, earthquake monitoring, troubleshooting of mechanical equipment, and more. To fulfill the requirements of self-powered inertial sensing, inertial sensors enabled by triboelectric effect have been proposed as an effective solution. In this review, an overview of development of triboelectric effect based inertial sensors is systematically presented. To thoroughly understand and rationally design triboelectric effect based inertial sensors, we first discuss the theoretical study and the structural design of triboelectric effect based inertial sensors. The fabrication of these inertial sensors is further discussed. Subsequently, critical output parameters of recent triboelectric effect based inertial sensors including sensitivity, linearity, detection range, mechanical shock survivability, and detection direction are summarized. And then, various applications of these sensors are summarized. Finally, based on recent progress, the superiority, existing challenges, and prospects for triboelectric effect based inertial sensors are outlined and discussed. This review will lead to a deeper understanding and exploration of triboelectric effect based inertial sensors for researchers and engineers.

中文翻译：

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朝向通过摩擦电效应实现的自供电惯性传感器

随着物联网（IoT）时代的到来，惯性传感器被认为是惯性导航，地震监测，机械设备故障排除等必不可少的组件。为了满足自供电惯性传感的要求，提出了利用摩擦电效应的惯性传感器作为有效的解决方案。在这篇综述中，系统地介绍了基于摩擦电效应的惯性传感器的发展概况。为了彻底理解和合理设计基于摩擦电效应的惯性传感器，我们首先讨论基于摩擦电效应的惯性传感器的理论研究和结构设计。这些惯性传感器的制造将进一步讨论。后来，总结了最近基于摩擦电效应的惯性传感器的关键输出参数，包括灵敏度，线性，检测范围，机械冲击生存能力和检测方向。然后，总结了这些传感器的各种应用。最后，根据最近的进展，概述并讨论了基于摩擦电效应的惯性传感器的优越性，存在的挑战和前景。这次审查将为研究人员和工程师带来对基于摩擦电效应的惯性传感器的更深入的了解和探索。概述并讨论了基于摩擦电效应的惯性传感器的前景。这次审查将为研究人员和工程师带来对基于摩擦电效应的惯性传感器的更深入的了解和探索。概述并讨论了基于摩擦电效应的惯性传感器的前景。这次审查将为研究人员和工程师带来对基于摩擦电效应的惯性传感器的更深入的了解和探索。