Abstract Ion beam technology has shown itself worth to be an efficient method to produce nanoparticles embedded in dielectrics for photoelectronic devices. However, direct ion-beam deposition of nanoparticles (NPs) on the surface of dielectrics is rarely reported because the conventional metal ion source runs into difficulties to generate low energy (

中文翻译：

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使用固态银离子源直接离子束沉积银纳米颗粒

摘要 离子束技术已证明其是一种生产嵌入在光电器件电介质中的纳米粒子的有效方法。然而，由于传统的金属离子源难以产生低能量，因此很少报道纳米粒子（NPs）在电介质表面的直接离子束沉积。