The dynamic characteristics of a probing system directly affect the accuracy of dynamic measuring results and should be investigated comprehensively. Many methods can be used to identify the dynamic model of a probe. However, the uncertainty evaluation for the identified probe model remains a problem. A method based on signal transmission chain analysis is proposed in this paper to evaluate the uncertainties for dynamic identification of a micro contact probe. Taking a homemade micro contact probe as an example, the adaptive recursive least squares method is adopted to identify the probe model parameters according to the step input signals and the corresponding output signals of the probe. The signal transmission chain analysis method is utilized to analyse the source of uncertainties and their transmission relationships. The Monte Carlo method is employed to evaluate and combine the uncertainties of the obtained model parameters. Evaluation results are verified by experiments. ...

中文翻译：

---

基于信号传输链分析方法的微接触探针动态识别不确定度评估

探测系统的动态特性直接影响动态测量结果的准确性，应进行全面研究。可以使用许多方法来识别探针的动态模型。但是，对于确定的探针模型的不确定性评估仍然是一个问题。提出了一种基于信号传输链分析的方法，用于评估微接触探针动态识别的不确定性。以自制的微接触探针为例，采用自适应递推最小二乘方法根据阶跃输入信号和探针对应的输出信号识别探针模型参数。信号传输链分析方法用于分析不确定性的来源及其传输关系。采用蒙特卡洛方法评估和组合所获得模型参数的不确定性。评价结果通过实验验证。...