Combining femtosecond laser exposure with chemical etching enables the fabrication of arbitrary 3D shapes in fused silica with micron precision. Here, we investigate the use of this process combined with additional tuning of the material properties for controlling the vibrational behavior of silica microcantilevers through an acoustic black hole (ABH) effect. This effect, caused by a tapered profile at the cantilever's end, enables the trapping of propagating acoustic waves. Such cantilevers with ABH design show a remarkable amplitude decrease in the resonance peak without adding any damping material as demonstrated experimentally. Finally, using Fourier‐transform infrared spectroscopy (FTIR), we observe residual effects of the laser exposure at the surface of the specimen that have noticeable influence on the dynamic behavior of the device.

中文翻译：

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FS激光微加工通过结构和材料改性对整体式石英玻璃悬臂的ABH阻尼

飞秒激光曝光与化学蚀刻相结合，可以在微米级精度的熔融石英中制造任意3D形状。在这里，我们研究了该工艺与材料性能的其他调整相结合的使用，以通过声黑洞（ABH）效应控制二氧化硅微悬臂梁的振动行为。由悬臂端的锥形轮廓引起的这种效应使得能够捕获传播的声波。这种具有ABH设计的悬臂，在不添加任何阻尼材料的情况下，在共振峰处振幅明显降低，这已通过实验证明。最后，使用傅立叶变换红外光谱（FTIR），我们观察到样品表面激光暴露的残余效应，这些残余效应对设备的动态行为具有显着影响。