Abstract Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibility for non-destructive elemental depth profiling with commercial laboratory equipment using four real-life CrSc multilayer samples. Comparative measurements at the laboratory of PTB at the synchrotron radiation facility BESSY II confirm the results and prove the potential of laboratory equipment for the reliable analysis of stratified materials with sub-nanometer layer thicknesses.

中文翻译：

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实验室掠入射 X 射线荧光光谱作为亚纳米 CrSc 多层水窗光学研究的分析工具

摘要 由于极小的层厚度和层间元素的严重混合，因此难以制造用于水窗范围内辐射的高效多层光学器件。因此，充分的分析和简短的反馈循环对于制造商提高性能和效率至关重要。我们展示了使用商业实验室设备使用四个真实的 CrSc 多层样品进行无损元素深度分析的可能性。在同步加速器辐射设施 BESSY II 的 PTB 实验室进行的比较测量证实了结果，并证明了实验室设备对亚纳米层厚度分层材料进行可靠分析的潜力。