High-entropy alloys (HEAs) generally possess complex component combinations and abnormal properties. The traditional methods of investigating these alloys are becoming increasingly inefficient because of the unpredictable phase transformation and the combination of many constituents. The development of compositionally complex materials such as HEAs requires high-throughput experimental methods, which involves preparing many samples in a short time. Here we apply the high-throughput method to investigate the phase evolution and mechanical properties of novel HEA film with the compositional gradient of (Cr,Fe,V)-(Ta,W). First, we deposited the compositional gradient film by co-sputtering. Second, the mechanical properties and thermal stability of the (Cr_0.33Fe_0.33V_0.33)_x(Ta_0.5W_0.5)_100−x (x = 13–82) multiple-based-elemental (MBE) alloys were investigated. After the deposited wafer was annealed at 600°C for 0.5 h, the initial amorphous phase was transformed into a body-centered cubic (bcc) structure phase when x = 33. Oxides were observed on the film surface when x was 72 and 82. Finally, the highest hardness of as-deposited films was found when x = 18, and the maximum hardness of annealed films was found when x = 33.

高熵合金（HEA）通常具有复杂的成分组合和异常特性。由于不可预测的相变以及许多成分的组合，研究这些合金的传统方法变得越来越无效率。组成复杂的材料（例如HEA）的开发需要高通量的实验方法，其中涉及在短时间内制备许多样品。在这里，我们应用高通量方法研究了成分为（Cr，Fe，V）-（Ta，W）的新型HEA膜的相演化和力学性能。首先，我们通过共溅射沉积成分梯度膜。二，（Cr _0.33 Fe _0.33 V _0.33的力学性能和热稳定性）_x（Ta _0.5 W _0.5）_{100- x}（x = 13-82）多元基元素（MBE）合金。在将沉积的晶片在600°C退火0.5小时后，当x = 33时，初始非晶相转变为以体心立方（bcc）结构相。当x为72和82时，在膜表面观察到氧化物。最后，当x = 18时，发现沉积膜的最高硬度，当x = 33时，发现退火膜的最大硬度。