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An optical method for determination of the mass thickness of thin gold films with arbitrary morphology
Thin Solid Films ( IF 2.1 ) Pub Date : 2020-11-01 , DOI: 10.1016/j.tsf.2020.138392
Sergey V. Starinskiy , Alexey I. Safonov , Veronica S. Sulyaeva , Alexey A. Rodionov , Yuri G. Shukhov , Alexander V. Bulgakov

Abstract The mass thickness of thin metal films is an important parameter determining the film structure, however a robust routine method for its determination is still missing. In this work, we have developed a simple optical method for determining the mass thickness of gold films with arbitrary morphology on transparent substrates in the range 1–20 nm. The method is based on film spectrophotometry in the far-UV range when the light attenuation is due to interaction with core electrons and thus the influence of the film morphology is negligible. The calibration was performed at a wavelength of 200 nm for gold films of known thickness and a good agreement with the Beer–Lambert law was obtained. The feasibility of the method was demonstrated with gold films of various morphologies produced on quartz substrates by pulsed laser deposition.

中文翻译:

一种测定任意形貌金薄膜质量厚度的光学方法

摘要 金属薄膜的质量厚度是决定薄膜结构的重要参数,但目前还缺乏一种可靠的常规方法来确定其结构。在这项工作中,我们开发了一种简单的光学方法,用于确定透明基板上 1-20 nm 范围内具有任意形态的金膜的质量厚度。该方法基于远紫外范围内的薄膜分光光度法,此时光衰减是由于与核心电子的相互作用,因此薄膜形态的影响可以忽略不计。校准是在 200 nm 波长下对已知厚度的金膜进行的,并且获得了与 Beer-Lambert 定律的良好一致性。通过脉冲激光沉积在石英基板上产生的各种形态的金膜证明了该方法的可行性。
更新日期:2020-11-01
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