Recently, as the concentration of fine dust in the atmosphere has increased due to an increase in the use of fossil fuel power plants, automobiles, and factories, it has been increasingly important to measure fine dust in the atmosphere. This is because exposure to fine dust is closely related to the incidence of respiratory and cardiovascular diseases and eventually affects mortality. In this paper, we introduce a MEMS particle sensor based on the resonance frequency shift according to added particle mass. The actuation is driven by Aluminum nitride (AlN), and the total thickness is 2.8 μm. A laser doppler vibrometer (LDV), an optical measuring instrument, was used to measure the resonance frequency of the sensor. Airborne particles naturally were deposited on the sensor. To show the frequency shift according to the particle mass, the frequency shift was measured by dividing the case where the deposited particle mass was small and large. In each case, the frequency shift according to the deposited particle mass was predicted and compared with the frequency shift measured by LDV. It was shown that the deposited particle mass and frequency shift are proportional. The deposition of particulate mass was estimated by image analysis. The frequency shift caused by the particle mass deposited on the sensor was defined as the sensitivity of the sensor. The estimated sensitivity of the sensor is 0.219 to 0.354 kHz/pg.

中文翻译：

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基于谐振频移的MEMS粒子传感器

近来，由于由于化石燃料发电厂，汽车和工厂的使用增加而使大气中的微尘浓度增加，因此测量大气中的微尘变得越来越重要。这是因为暴露于细粉尘与呼吸系统疾病和心血管疾病密切相关，并最终影响死亡率。在本文中，我们根据添加的粒子质量，基于共振频率偏移引入了MEMS粒子传感器。驱动由氮化铝（AlN）驱动，总厚度为2.8μm。激光多普勒振动计（LDV）是一种光学测量仪器，用于测量传感器的共振频率。空气中的颗粒自然会沉积在传感器上。为了显示根据粒子质量的频移，通过将沉积的颗粒质量小而大的情况分开来测量频移。在每种情况下，根据沉积的颗粒质量预测频移，并将其与通过LDV测量的频移进行比较。结果表明，沉积的颗粒质量与频移成正比。通过图像分析估计颗粒物的沉积。由沉积在传感器上的颗粒质量引起的频移定义为传感器的灵敏度。传感器的估计灵敏度为0.219至0.354 kHz / pg。结果表明，沉积的颗粒质量与频移成正比。通过图像分析估计颗粒物的沉积。由沉积在传感器上的颗粒质量引起的频移定义为传感器的灵敏度。传感器的估计灵敏度为0.219至0.354 kHz / pg。结果表明，沉积的颗粒质量与频移成正比。通过图像分析估计颗粒物的沉积。由沉积在传感器上的颗粒质量引起的频移定义为传感器的灵敏度。传感器的估计灵敏度为0.219至0.354 kHz / pg。