This article presents active noise cancelation (ANC) based on MEMS resonant microphone array (RMA) which offers very high sensitivities (and thus very low noise floors) near resonance frequencies and also provides filtering in acoustic domain. The ANC is targeted to actively cancel out any sound between 5–9 kHz (above the speech range of 300 – 3,400 Hz). The ANC works best around the resonance frequencies of the resonant microphones where the sensitivities are high. The ANC has been implemented with analog inverter, digital phase compensator, digital adaptive filter, and deep learning, and shown to perform better with a digital adaptive filter for both RMA-based and flat-band-microphone-based ANC. At the same time, when the sound intensity over 5 – 9 kHz is low, RMA-based ANC with adaptive filter works the best among different approaches tested. Automatic speech recognition under different noises (of different intensity levels) has been tested with ANC. In all the tested cases, word error rate improves with ANC. [2020-0212]

中文翻译：

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使用 MEMS 谐振麦克风阵列进行主动降噪

本文介绍了基于 MEMS 谐振麦克风阵列 (RMA) 的有源噪声消除 (ANC)，它在谐振频率附近提供非常高的灵敏度（因此本底噪声非常低），并且还提供声学域的滤波。ANC 旨在主动消除 5–9 kHz 之间（高于 300 – 3,400 Hz 的语音范围）的任何声音。ANC 在灵敏度较高的谐振麦克风的谐振频率周围效果最佳。ANC 已经通过模拟反相器、数字相位补偿器、数字自适应滤波器和深度学习实现，并显示出对于基于 RMA 和基于平带麦克风的 ANC 的数字自适应滤波器的性能更好。同时，当超过 5 – 9 kHz 的声音强度较低时，基于 RMA 的自适应滤波器 ANC 在测试的不同方法中效果最佳。已使用 ANC 测试了不同噪声（不同强度级别）下的自动语音识别。在所有测试案例中，ANC 提高了字错误率。[2020-0212]