This paper presents a 1-port thickness-shear (TS) mode quartz resonator with very high voltage gain, suitable for use in “near-zero-power” radios. These devices offer voltage gains >100x (referenced to $50~\Omega $ ) at ~50 MHz and >300x at ~75 MHz with ~60 fF load, which is the highest voltage gain directly measured to date in a piezoelectric micromechanical resonator. Six resonators with resonance ${f}_{{\text {r}}}\approx 50$ MHz and identical electrode dimensions are characterized by S₁₁ measurements and by directly measuring the voltage gain using a high-impedance active probe. Quality factor ( ${Q}$ ) up to 140,000 at ~50 MHz and electromechanical coupling ( ${k}_{{\text {eff}}}^{2}$ ) up to 0.445% are demonstrated. In several devices, voltage gain around or above 100 V/V is observed for load ${C}~\approx ~60$ fF, and the gain changes as expected with decreasing load impedance. Additionally, a similar 1-port quartz resonator design at ${f}_{{\text {s}}}~\approx ~75$ MHz is demonstrated to have voltage gain over 300 V/V (referenced to $50\Omega $ ) and ${Q}$ around 335,000. These quartz resonators are fabricated in a mature, commercially available process, promoting widespread integration into radio-frequency (RF) wake-up receivers (WURs). [2020-0196]

中文翻译：

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具有 >100 V/V 增益的 1 端口压电谐振器

本文介绍了一种具有非常高电压增益的 1 端口厚度剪切 (TS) 模式石英谐振器，适用于“近零功率”无线电。这些器件提供 >100 倍的电压增益（参考 $50~\Omega $ ) 在 ~50 MHz 和 >300x 在 ~75 MHz 和 ~60 fF 负载，这是迄今为止在压电微机械谐振器中直接测量的最高电压增益。有共振的六个共振器 ${f}_{{\text {r}}}\约 50$ MHz 和相同的电极尺寸的特点是 S ₁₁测量和使用高阻抗有源探头直接测量电压增益。品质因数 ( ${Q}$ ) 高达 140,000 在 ~50 MHz 和机电耦合 ( ${k}_{{\text {eff}}}^{2}$ ) 显示高达 0.445%。在一些器件中，观察到负载的电压增益约为或高于 100 V/V ${C}~\约~60$ fF，增益会随着负载阻抗的降低而变化。此外，类似的 1 端口石英谐振器设计位于 ${f}_{{\text {s}}}~\approx ~75$ MHz 被证明具有超过 300 V/V 的电压增益（参考 $50\欧米茄 $ ） 和 ${Q}$ 约 335,000。这些石英谐振器采用成熟的商用工艺制造，促进了与射频 (RF) 唤醒接收器 (WUR) 的广泛集成。[2020-0196]