In this paper, we present the design, fabrication, and characterization of a compact $4\times 4$ piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a $4~\mu \text{m}$ -thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only $1.8\times1.6$ mm² with each pMUT element having a diameter of $210~\mu \text{m}$ . The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087]

中文翻译：

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用于内窥镜光声成像的基于陶瓷 PZT 的 PMUT 阵列

在本文中，我们介绍了一个紧凑型的设计、制造和表征 $4\乘以4$ 压电微机械超声换能器（pMUT）阵列及其在光声成像中的应用。这个 pMUT 阵列的独特之处在于集成了一个 $4~\mu \text{m}$ - 厚陶瓷 PZT，比溶胶凝胶或溅射 PZT 具有更高的压电系数和更低的应力。制造的 pMUT 阵列的芯片尺寸很小，只有 $1.8\times1.6$ mm ²，每个 pMUT 元件的直径为 $210~\mu \text{m}$ . 所制造的装置通过电阻抗测量和声学传感测试进行表征。使用制造的 pMUT 阵列嵌入铅笔芯的琼脂模型也成功地证明了光声成像。[2020-0087]