High-precision microelectromechanical inertial sensors based on spring-mass structures are of great interests for a wide range of applications, including inertial navigation, disaster warning and resource exploration. Lowering the resonant frequency is essential to further improve the sensitivity of the sensors. However, conventional approaches are facing insurmountable difficulties from size reduction to machining precision. This paper proposed a novel quasi-zero-stiffness mechanism that is compatible with MEMS technologies together with a micromaching approach for adjusting the stiffness precisely. By improving the compliance of a typical spring with a negative-stiffness compensation mechanism induced by axial force, the resonant frequency of the micro spring-mass structure is lowered to 0.7 Hz, which is at least 3 times lower than current state-of-the-art micro structures. Based on this ultra-sensitive micro structure base on the quasi-zero-stiffness mechanism, the micro inertial sensor, with a chip size of a postage stamp, has shown a low self-noise of 0.6 nrad/ $\surd $ Hz at 0.04 Hz and a high long-term stability that are comparable to traditional pendulum inertial sensors. It is the first micro device, to our knowledge, that can successfully measure the tidal tilt signal. [2020-0048]

中文翻译：

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采用准零刚度机构的微机械惯性传感器测量潮汐倾斜

基于弹簧质量结构的高精度微机电惯性传感器具有广泛的应用价值，包括惯性导航、灾害预警和资源勘探。降低谐振频率对于进一步提高传感器的灵敏度至关重要。然而，传统方法面临着从尺寸减小到加工精度无法克服的困难。本文提出了一种新的准零刚度机制，它与 MEMS 技术兼容，并采用微加工方法精确调整刚度。通过轴向力引起的负刚度补偿机制提高典型弹簧的柔量，微弹簧质量结构的共振频率降低到0.7Hz，这至少比目前最先进的微结构低 3 倍。基于这种基于准零刚度机制的超灵敏微结构，芯片大小的微惯性传感器在0.04时表现出0.6 nrad/ $\surd $ Hz的低自噪声Hz 和可与传统摆式惯性传感器相媲美的高长期稳定性。据我们所知，这是第一个能够成功测量潮汐倾斜信号的微型设备。[2020-0048] 据我们所知，这是第一个能够成功测量潮汐倾斜信号的微型设备。[2020-0048] 据我们所知，这是第一个能够成功测量潮汐倾斜信号的微型设备。[2020-0048]