A novel high sensitivity relative humidity (RH) sensor was proposed by using micro structure plastic optical fiber (POF) based on the surface plasmon resonance (SPR) effect and the evanescent wave (EW) loss. The micro structure was fabricated on the POF and coated with a gold layer and agarose, adopting the sputtering and dip-coating technique. These construction effects on the attenuation of power caused by the SPR effect and the EW loss were used to perform RH detections. The agarose’s different refractive indexes (RIs) caused fluctuations in the transmission power when the humidity increased. The demonstrated experimental results showed that the proposed sensor achieved a linear response from 20% RH to 80% RH with a high sensitivity of 0.595µW/%. The proposed sensor had the advantages of fast response and recovery. Furthermore, the temperature dependence and the repeatability test of the sensor were also performed.

基于表面等离子体共振（SPR）效应和van逝波（EW）损耗，提出了一种利用微结构塑料光纤（POF）的新型高灵敏度相对湿度传感器。通过溅射和浸涂技术在POF上制备了微结构，并涂覆了金层和琼脂糖。这些由SPR效应和EW损耗引起的对功率衰减的构造效应被用于进行RH检测。当湿度增加时，琼脂糖的不同折射率（RIs）引起传输功率的波动。实验结果表明，所提出的传感器在20％RH至80％RH范围内具有线性响应，并具有0.595µW /％的高灵敏度。提出的传感器具有快速响应和恢复的优点。此外，