We achieve record concurrent combinations of bandwidth (18 GHz), optical output power (150 mW), and wall plug efficiency (30%) with a unique arrangement of 19-element, electrically parallel 980 nm vertical cavity surface emitting laser (VCSEL) arrays. We use a new two-dimensional, quasi honeycomb geometry with inter-VCSEL ridge connectors—made nonconducting by selective thermal oxidation—to improve heat dissipation and facilitate a single top surface anode contact. Via on-wafer probing we perform static and dynamic measurements over the wide temperature range of 23 °C to 85 °C and extract, report, and discuss key array figures-of-merit.

中文翻译：

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具有垂直腔面发射激光脊连接器的19元素垂直腔面发射激光器阵列

我们采用19元素电平行980 nm垂直腔表面发射激光器（VCSEL）阵列的独特布置，实现了创纪录的带宽（18 GHz），光输出功率（150 mW）和墙塞效率（30％）的并发组合。 。我们使用带有VCSEL间脊连接器的新型二维准蜂巢状结构（通过选择性热氧化使其不导电）来改善散热并促进单个上表面阳极接触。通过晶圆上探测，我们可以在23°C至85°C的宽温度范围内执行静态和动态测量，并提取，报告和讨论关键的阵列品质因数。