Abstract TiO2 thin films have been deposited on glass substrates with and without ZnO underlayer by sol-gel dip coating process. XRD patterns show the formation of anatase phase with the diffraction lines (1 0 1) and (2 0 0) in TiO2/glass sample. In TiO2/(ZnO/glass) sample, TiO2 is composed of anatase phase with the diffraction line (2 0 0) but the diffraction peaks of ZnO wurtzite are also well-defined. The determination of the refractive index and the thickness of the waveguiding layers has been performed by m-lines spectroscopy. The thickness of TiO2 thin films deduced by Rutheford Backscattering Geometry (RBS) agrees well with that obtained by m-lines spectroscopy. TiO2/glass sample exhibits one guided TE0 and TM0 polarized modes. In TiO2/(ZnO/glass) sample, only, TE0 single mode has been excited due to cutoff condition.

中文翻译：

---

溶胶-凝胶法在有和没有 ZnO 底层的玻璃基板上制备 TiO2 波导薄膜

摘要 TiO2 薄膜已通过溶胶-凝胶浸涂工艺沉积在有和没有 ZnO 底层的玻璃基板上。XRD 图显示锐钛矿相的形成，衍射线为 (1 0 1) 和 (2 0 0) 在 TiO2/玻璃样品中。在 TiO2/(ZnO/玻璃) 样品中，TiO2 由锐钛矿相组成，衍射线为 (2 0 0)，但 ZnO 纤锌矿的衍射峰也很明确。波导层的折射率和厚度的测定已通过 m 线光谱法进行。由卢瑟福背散射几何 (RBS) 推导出的 TiO2 薄膜厚度与 m 线光谱获得的厚度一致。TiO2/玻璃样品表现出一种引导的 TE0 和 TM0 偏振模式。在 TiO2/(ZnO/玻璃) 样品中，由于截止条件，只有 TE0 单模被激发。