当前位置: X-MOL 学术Microelectron. Eng. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
A study of greyscale electron beam lithography for a 3D round shape Kinoform lens for hard X-ray optics
Microelectronic Engineering ( IF 2.3 ) Pub Date : 2020-10-01 , DOI: 10.1016/j.mee.2020.111435
Xujie Tong , Chen Xu , Jingyuan Zhu , Chengwen Mao , Xiangjun Zhen , Wanxia Huang , Yifang Chen

Abstract For high quality imaging of materials in nanoscale by hard X-ray optics, high resolution lenses with high focusing/imaging efficiency are needed. Refraction based conventional Kinoform lenses with 1D linear configuration in Si has been attempted for decades, but there has still been no sign of success due to the enormous difficulty in fabrication. This paper proposes a novel configuration of golden Kinoform lenses with round shape on a plate, in which each zone maintains the typical 3D parabolic profile as seen in the traditional 1D counterpart. The major focus in this work is on the generation of the 3D profile in e-beam resist through greyscale electron beam lithography (EBL) as the template for the golden Kinoform lens. Systematic study of the greyscale lithography conditions, including the comparisons of resists, developers and charge distributions, has been conducted by using Monte Carlo simulation as well as e-beam lithography. Initial results have been achieved for replicating the desired 3D profile of the golden Kinoform lens in the resist. Using the generated profile in resist as templates, the golden Kinoform lens with 200 μm diameter and 3.5 μm height has been successfully fabricated, for the first time, which will hopefully replace the existing Fresnel zone plates for hard X-ray imaging with high resolution and high efficiency.

中文翻译:

用于硬 X 射线光学器件的 3D 圆形 Kinoform 透镜的灰度电子束光刻研究

摘要 为了通过硬 X 射线光学对纳米级材料进行高质量成像,需要具有高聚焦/成像效率的高分辨率镜头。几十年来,人们一直在尝试在硅中具有一维线性配置的基于折射的传统 Kinoform 透镜,但由于制造过程中的巨大困难,仍然没有成功的迹象。本文提出了一种在平板上具有圆形形状的金色 Kinoform 透镜的新配置,其中每个区域都保持典型的 3D 抛物线轮廓,如传统 1D 对应物所见。这项工作的主要重点是通过灰度电子束光刻 (EBL) 作为金色 Kinoform 透镜的模板在电子束抗蚀剂中生成 3D 轮廓。灰度光刻条件的系统研究,包括抗蚀剂的比较,显影剂和电荷分布,已通过使用蒙特卡罗模拟以及电子束光刻进行。在抗蚀剂中复制所需的金色 Kinoform 透镜的 3D 轮廓已经取得了初步结果。以抗蚀剂中生成的轮廓为模板,首次成功制造出直径为 200 μm、高度为 3.5 μm 的金色 Kinoform 透镜,有望取代现有的菲涅耳波带片,用于高分辨率和高分辨的硬 X 射线成像。高效率。
更新日期:2020-10-01
down
wechat
bug