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Design of a novel gear-like disk resonator gyroscope with high mechanical sensitivity
Microsystem Technologies ( IF 2.1 ) Pub Date : 2020-10-03 , DOI: 10.1007/s00542-020-05047-6
Jun Feng , Weiping Zhang , Liutao Gu , Zhaoyang Liu

The mechanical sensitivity (\(S_{mech}\)) is an important performance for ring-like disk resonator gyroscope (RDRG). To provide guidelines for improving \(S_{mech}\), the reliable expression of \(S_{mech}\) is derived by taking into account frequency split and difference of effective mass. The design strategy indicates the main way to improve \(S_{mech}\) is reducing effective stiffness and frequency split. Then a novel gear-like disk resonator gyroscope (GDRG) is designed by replacing circular rings of RDRG with meander-shaped rings consisting of linear beams. Afterwards, the characteristics between RDRG and GDRG are compared. For gyroscopes fabricated ideally, GDRG has a decrease of 58.40% on effective stiffness, an increase of 49.51% on quality factor (Q) and an increase of 694.28% on \(S_{mech}\), comparing with RDRG. For actual fabricated gyroscopes, GDRG has much less frequency split than RDRG due to its much higher immunity to crystal orientation error and fabrication errors. Affected by these errors, effective stiffness and Q have small deviations from the values of gyroscopes fabricated ideally, \(S_{mech}\) decreases greatly and \(S_{mech}\) of GDRG is always much higher than that of RDRG. These results have verified GDRG can achieve high \(S_{mech}\) due to its small effective stiffness, small frequency split and high Q. The ideas and methods described in this paper can also be applied to other similar gyroscopes.



中文翻译:

具有高机械灵敏度的新型齿轮状圆盘谐振陀螺仪的设计

机械灵敏度(\(S_ {mech} \))是环形磁盘谐振器陀螺仪(RDRG)的重要性能。为了提供改善的指导方针\(S_ {机甲} \) ,的可靠表达\(S_ {机甲} \)是通过考虑频率分割和有效质量的差导出。设计策略指出了改进\(S_ {mech} \)的主要方法正在降低有效刚度和频率分裂。然后,通过用线性光束组成的曲折形环代替RDRG的圆环,设计出一种新颖的齿轮状磁盘谐振器陀螺仪(GDRG)。然后,比较了RDRG和GDRG之间的特性。对于理想制造的陀螺仪,与RDRG相比,GDRG的有效刚度降低58.40%,品质因数(Q)提高49.51%,\(S_ {mech} \)提高694.28%。对于实际制造的陀螺仪,由于其对晶体取向误差和制造误差的抵抗力强得多,因此GDRG的频率分割要比RDRG小得多。受这些误差的影响,有效刚度和Q与理想情况下制造的陀螺仪的值有很小的偏差,GDRG的\(S_ {mech} \)大大降低,并且GDRG的\(S_ {mech} \)始终远高于RDRG。这些结果证明了GDRG的有效刚度小,频率分割小和Q高,因此可以达到较高的\(S_ {mech} \)。本文中描述的思想和方法也可以应用于其他类似的陀螺仪。

更新日期:2020-10-04
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