Abstract

The state-of-art of studies of processes involving small fractions of particles formed as a result of chemical transformations of the source gas or appearing from the outside as an impurity is discussed. Various high-sensitivity methods for measuring the low concentrations of particles are considered. The main focus is on spectral methods, both classical and laser ones. The main modern fields of the application of non-equilibrium plasma, features, and achievements of the diagnostic tools used in them are highlighted. The emphasis is on spectroscopic studies of plasma purity in the low-temperature near-wall layers of thermonuclear reactors. In this case, the issue of the penetration of water molecules into the plasma chamber from the cooling circuits is of particular importance. In view of the limited accessibility to the reactors, new remote versions of spectral emission methods are being developed that are focused on the diagnostics of the ITER near-wall plasma. A new method of multispectral optical actinometry is discussed, in which intermediate chemically unstable particles can play the role of actinometers. This broadens the range of possibilities for quantitative measurements of concentrations of particles of different kinds, and increases the sensitivity. Effective actinometric pairs were found for the objects under consideration, e.g., hydrogen and deuterium atoms. The schemes are worked out on laboratory facilities, and kinetic models of plasma-chemical processes are developed. Scaling of the results of model experiments makes it possible to predict the measurement of the impurity flows at the level (10^–9–10^–13) Pa m³ s^–1 with the localization of sources determined by the spatial resolution of the optical system.

中文翻译：

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在低压平衡低温等离子体中控制杂质，流量和局域的光谱方法

摘要

讨论了有关工艺研究的最新进展，这些工艺涉及由于原料气体的化学转化而形成的小颗粒颗粒或从外部以杂质形式出现的颗粒。考虑了用于测量低浓度颗粒的各种高灵敏度方法。主要关注光谱方法，包括传统方法和激光方法。重点介绍了非平衡等离子体应用的主要现代领域，功能以及在其中使用的诊断工具的成就。重点是对热核反应堆的低温近壁层中血浆纯度的光谱学研究。在这种情况下，水分子从冷却回路渗入等离子体室的问题尤为重要。鉴于反应堆的可及性有限，正在开发新的远程版本的光谱发射方法，重点是对ITER近壁等离子体的诊断。讨论了一种新的多光谱光化学计量学方法，其中化学不稳定的中间颗粒可以发挥光化计的作用。这拓宽了定量测量不同种类颗粒浓度的可能性范围，并提高了灵敏度。对于所考虑的对象，例如氢原子和氘原子，发现了有效的光化学计量对。该方案在实验室设施上制定，并开发了等离子体化学过程的动力学模型。通过对模型实验结果的缩放，可以预测杂质水平的测量值（10^–9 –10 ^–13）Pa m ³ s ^–1，光源的定位取决于光学系统的空间分辨率。