Abstract

Methods for calculating the frequency of resonant oscillations of rectangular oscillators are considered. The operation of a micromechanical oscillator based on a silicon cantilever was theoretically studied in the problem of measuring the attached object mass. The dependence of mechanical parameters of an oscillator on the arrangement of an active (sensitive) region on the oscillator surface is considered. Resonant frequencies are calculated using the COMSOL Multiphysics and Mathcad software packages.

中文翻译：

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具有附加质量的微机械振荡器的共振振荡的计算

摘要

考虑了用于计算矩形振荡器的谐振频率的方法。从理论上研究了基于硅悬臂的微机械振荡器的操作，以测量附着物体的质量。考虑了振荡器的机械参数对振荡器表面上的有源（敏感）区域的布置的依赖性。谐振频率是使用COMSOL Multiphysics和Mathcad软件包计算的。