Abstract NiCrAlO/Al2O3 solar selective coating prepared by direct current (DC) magnetron sputtering and water boiling is demonstrated in this paper. Firstly, the coating consisting of tandem layers of Au/NiCrAl/Al with different NiCr volume fractions in NiCrAl sublayers is deposited solely by DC magnetron sputtering. Then the coating is boiled by deionized water and dehydrated by vacuum heating. The surface morphology, the depth distributions and relative chemical states of elements of the coating are characterized by scanning electron microscopy (SEM), Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). It is found that Al in the coating is totally oxidized while most of NiCr and Au keep metallic after water boiling and vacuum dehydration, which forms the effective solar selective coating consisting of Au/NiCrAlO/Al2O3 with different metallic NiCr volume fractions. High near normal solar absorptance of 0.964 and low near normal thermal emittance of 0.066 are demonstrated by the reflectance measured by UV-VIS-IR spectrometer. The combination of DC magnetron sputtering and water boiling is very promising for fabrication of solar selective coating based on the dielectric aluminum oxide, as it is environmentally friendly and circumvents the radio frequency (RF) magnetron sputtering which needs RF automatic matching.

中文翻译：

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直流磁控溅射和水沸腾制备NiCrAlO/Al2O3太阳能选择性涂层

摘要 本文论证了采用直流（DC）磁控溅射和水沸腾制备NiCrAlO/Al2O3太阳能选择性涂层。首先，由在 NiCrAl 亚层中具有不同 NiCr 体积分数的 Au/NiCrAl/Al 串联层组成的涂层仅通过直流磁控溅射沉积。然后将涂层用去离子水煮沸，真空加热脱水。通过扫描电子显微镜 (SEM)、俄歇电子能谱 (AES) 和 X 射线光电子能谱 (XPS) 表征涂层元素的表面形貌、深度分布和相对化学状态。发现涂层中的Al被完全氧化，而NiCr和Au大部分在水沸腾和真空脱水后保持金属，它形成了由具有不同金属 NiCr 体积分数的 Au/NiCrAlO/Al2O3 组成的有效太阳能选择性涂层。UV-VIS-IR 光谱仪测量的反射率证明了 0.964 的高近正常太阳吸收率和 0.066 的低近正常热辐射率。直流磁控溅射和水沸腾的结合对于制备基于电介质氧化铝的太阳能选择性涂层非常有前景，因为它对环境友好，并且避开了需要射频自动匹配的射频（RF）磁控溅射。