Coatings in the Ta-Zr-Si-B-C-N system were produced by magnetron sputtering of a TaSi₂-Ta₃B₄-(Ta,Zr)B₂ ceramic target in the Ar medium and Ar-N₂ and Ar-C₂H₄ gas mixtures. The structure and composition of coatings were studied using scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersion spectroscopy, and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests using 100Cr6 and Al₂O₃ balls. The oxidation resistance of coatings was evaluated by microscopy and X-ray diffraction after annealing in air at temperatures up to 1200 °C. The reactively-deposited coatings containing from 30% to 40% nitrogen or carbon have the highest hardness up to 29 GPa and elastic recovery up to 78%. Additionally, coatings with a high carbon content demonstrated a low coefficient of friction of 0.2 and no visible signs of wear when tested against 100Cr6 ball. All coatings except for the non-reactive ones can resist oxidation up to a temperature of 1200 °C thanks to the formation of a protective film based on Ta₂O₅ and SiO₂ on their surface. Coatings deposited in Ar-N₂ and Ar-C₂H₄ demonstrated superior resistance to thermal cycling in conditions 20-T−20 °C (where T = 200–1000 °C). The present article compares the structure and properties of reactive and “standard-inert atmosphere” deposited coatings to develop recommendations for optimizing the composition.

中文翻译：

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TaZrSiB陶瓷阴极的反应性直流磁控溅射获得的N和C掺杂的Ta-Zr-Si-B硬质保护涂层的结构，抗氧化性，力学性能和摩擦学性能

Ta-Zr-Si-BCN系统中的涂层是通过磁控溅射在Ar介质，Ar-N ₂和Ar-C ₂ H中的TaSi ₂ -Ta ₃ B _4-（Ta，Zr）B ₂陶瓷靶制成的_4种混合气体。使用扫描电子显微镜，辉光放电光发射光谱，能量分散光谱和X射线衍射研究了涂层的结构和组成。使用纳米压痕和使用100Cr6和Al ₂ O _3的针盘试验确定了涂层的机械和摩擦学性能球。在高达1200°C的空气中退火后，通过显微镜和X射线衍射评估涂层的抗氧化性。含有30％到40％的氮或碳的反应沉积涂层具有最高的硬度（高达29 GPa）和弹性回复率（高达78％）。此外，当对100Cr6球进行测试时，具有高碳含量的涂料显示出0.2的低摩擦系数，并且没有明显的磨损迹象。由于非反应性涂层的表面均形成了基于Ta ₂ O ₅和SiO ₂的保护膜，因此所有涂层均能抵抗高达1200°C的氧化。沉积在Ar-N ₂和Ar-C ₂ H _4中的涂层在20-T-20°C（其中T = 200-1000°C）的条件下，具有优异的抗热循环性能。本文比较了反应性和“标准惰性气氛”沉积涂层的结构和性能，以提出优化成分的建议。