During gas measurement, there is a mass change of resonator in a micro-resonant gas sensor. If the design parameters are not selected rightly, there will be obvious vibration state change or even chaotic vibration during gas measurement. Here, using multi-field coupled nonlinear dynamics model considering mass change during gas adsorption and desorption, the nonlinear dynamics performance and chaotic vibration of the gas sensor are investigated. Effects of the initial clearance between resonator and base, excitation voltage and dynamic viscosity of the gas on the vibration states are analyzed. Considering mass change during gas adsorption and desorption, the stability intervals of the initial clearance, excitation voltage and dynamic viscosity of the gas are determined. Besides it, a proportional differential control link is used to tune the vibration state of the sensor. Results show that when mass change during gas adsorption and desorption is considered, the stability intervals of the initial clearance, excitation voltage and dynamic viscosity of the gas are reduced. To obtain stable operation performance, these parameters of the sensor should be selected properly. A proportional differential control link can tune the vibration state of the sensor easily.

在气体测量期间，微谐振气体传感器中的谐振器质量发生变化。如果不正确选择设计参数，在气体测量过程中会出现明显的振动状态变化甚至混乱的振动。在此，使用考虑了气体吸附和解吸过程中质量变化的多场耦合非线性动力学模型，研究了气体传感器的非线性动力学性能和混沌振动。分析了谐振器与基座之间的初始间隙，激励电压和气体的动态粘度对振动状态的影响。考虑到气体在吸附和解吸过程中的质量变化，确定了气体初始间隙，激发电压和动态粘度的稳定区间。除此之外 比例微分控制链接用于调整传感器的振动状态。结果表明，当考虑气体在吸附和解吸过程中的质量变化时，气体初始间隙，激发电压和动态粘度的稳定时间间隔减小。为了获得稳定的操作性能，应正确选择传感器的这些参数。比例微分控制链接可以轻松调整传感器的振动状态。