Abstract Traditional MEMS filters use a comb drive structure that suffers from the pull-in instability, which places a significant limitation on the achievable signal-to-noise ratio of the sensor. Because the output signal from a capacitive sensor is linearly related to the applied voltage, it is desirable to use a capacitive sensor that can withstand large voltages upwards of 100 V. However, the pull-in instability causes high voltages to destroy the device and a trade-off between performance and reliability must be made. Electrostatic levitation, which works by pulling electrodes apart instead of together, eliminates the pull-in instability and allows for very high voltages to be applied without damaging or destroying the sensor/actuator. This study theoretically and experimentally demonstrates that a filter based on electrostatic levitation eliminates the voltage limitation of the capacitive sensor, which has historically hampered the performance of the filter. A model of the filter is derived and validated with experimental data. Voltages up to 100 V are applied without damaging the filter.

中文翻译：

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使用静电悬浮实现高偏置电压 MEMS 滤波器

摘要 传统的MEMS滤波器采用梳状驱动结构，存在引入不稳定性的问题，这对传感器可实现的信噪比产生了很大的限制。由于电容式传感器的输出信号与施加的电压呈线性关系，因此最好使用能够承受 100 V 以上大电压的电容式传感器。然而，吸合不稳定性会导致高电压损坏器件和必须在性能和可靠性之间进行权衡。静电悬浮通过将电极拉开而不是一起来工作，消除了拉入不稳定性，并允许施加非常高的电压而不会损坏或破坏传感器/执行器。这项研究从理论上和实验上证明，基于静电悬浮的过滤器消除了电容传感器的电压限制，这在历史上阻碍了过滤器的性能。过滤器的模型被导出并用实验数据进行验证。施加高达 100 V 的电压不会损坏过滤器。