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Simple, low degree-of-freedom load-lock and in-vacuum sample transfer
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-09-01 , DOI: 10.1116/6.0000495
Catlin N. Schalk 1 , David A. Turner 1 , Ashley R. Gans-Forrest 1 , Matthew M. Jobbins 1 , S. Alex Kandel 1
Affiliation  

A mechanism is described for the loading and unloading of samples from an instrument housing in a way that achieves strong mechanical contact between the sample and housing. A single linear–rotary magnetically coupled feedthrough is required to effect transfer. An additional load-lock mechanism requires only a single linear magnetic feedthrough, which remains in the UHV part of the chamber. The load-lock itself has no motion feedthroughs, which simplifies design and maximizes the pump-down speed. 3D-printing technology allows for intricately detailed parts to be used in both the sample transfer and load-lock mechanisms.

中文翻译:

简单、低自由度的负载锁定和真空样品转移

描述了一种用于从仪器外壳加载和卸载样本的机制,其方式是实现样本和外壳之间的强机械接触。需要单个线性旋转磁耦合馈通来实现传输。额外的负载锁定机制只需要一个线性磁馈通,它保留在腔室的 UHV 部分。负载锁本身没有运动馈通,这简化了设计并最大限度地提高了抽气速度。3D 打印技术允许在样品转移和负载锁定机制中使用复杂详细的部件。
更新日期:2020-09-01
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