Large-area regular laser-induced periodic surface structures (LIPSSs) with a birefringence effect were efficiently produced on a glass surface coated with an indium tin oxide (ITO) film, through irradiation by a femtosecond laser (800 nm, 50 fs, 3 mJ, 1 kHz) focused with a cylindrical lens. The laser fluence of 0.44 J/cm² on the coated glass was only one-tenth of that on bare glass, which significantly reduced the thermal effect. Moreover, regular LIPSSs with a period as short as 100 nm could be produced efficiently. The retardance of the fabricated LIPSSs was measured to be up to 44 nm, which is eight times that of LIPSSs fabricated on bare glass. The mechanisms of such a large difference of retardance were studied by measuring the nanostructures and the concentration of In³⁺ ions on the cross section of nano-corrugated surface layer on bare glass and ITO-coated glass.

中文翻译：

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使用低通量飞秒激光通过圆柱透镜在涂有铟锡氧化物薄膜的玻璃上产生的规则周期性表面结构的表面双折射

通过飞秒激光（800 nm，50 fs，3 mJ）照射，在涂有铟锡氧化物（ITO）膜的玻璃表面上有效地产生了具有双折射效应的大面积规则激光诱导的周期性表面结构（LIPSSs）。 （1 kHz）。镀膜玻璃上的激光通量为0.44 J / cm ²，仅为裸玻璃上的激光通量的十分之一，这大大降低了热效应。此外，可以有效地生产周期短至100 nm的常规LIPSS。经测量，所制造的LIPSS的延迟高达44 nm，是在裸露玻璃上制造的LIPSS的延迟的八倍。通过测量纳米结构和In ³⁺的浓度研究了如此大的延迟差的机理 离子在裸玻璃和ITO涂层玻璃上的纳米波纹表面层的横截面上。