Abstract Testing large convex aspheric mirrors has always been a challenging metrology problem in optics. In response to this problem, a modified method that utilizes single wedge compensation to measure large convex aspheric mirrors is proposed in this paper. The principles of this method and aberration theory are first analyzed. Two simulation examples are designed to verify the method’s applicability, and the sensitivity of this configuration is also analyzed, which proves that the accuracy of the configuration can be better than 0.006 λ (3.8 nm) with careful alignment and calibration. These examples and this analysis show that this configuration is feasible and flexible.

中文翻译：

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使用单楔补偿和拼接方法测试大型凸非球面

摘要 测试大型凸面非球面镜一直是光学中具有挑战性的计量问题。针对这一问题，本文提出了一种利用单楔补偿测量大型凸面非球面镜的改进方法。首先分析该方法的原理和像差理论。设计了两个仿真实例来验证该方法的适用性，并分析了该配置的灵敏度，证明通过仔细对准和校准，该配置的精度可以优于0.006 λ（3.8 nm）。这些例子和这个分析表明这种配置是可行和灵活的。