Abstract White-light dispersive interferometry (WLDI) is an instantaneous, high-resolution optical metrological technique for measuring precise and complicated surfaces. This method enables nondestructive inspection of transparent-film-structure devices that are widely used in semiconductor packaging. We propose in this paper to use a home-built WLDI system with line-by-line spectral calibration, phase-shifting algorithm, and single-wave-number method for high-accuracy, simultaneous measurements of surface profiles and film thickness. By calibrating the relationship between wave-number and pixel position on each line of a two-dimensional detector, the line-by-line calibration method improves the measurement accuracy by correcting the spectral distortion caused by the optical system. Moreover, the spectral signal phase is obtained by the phase-shifting algorithm instead of by the Fourier transform method. The single-wave-number method is applied to the computation process by introducing the fringe order, and the measurement result indicates that it enhances the system immunity to environmental noise. A 1.806-μm-high standard step and a 1052.2-nm-thick standard film are measured to verify the system performance and show that the system is highly accurate and reliable.

中文翻译：

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使用线场白光色散干涉仪高精度同时测量表面轮廓和薄膜厚度

摘要 白光色散干涉测量法 (WLDI) 是一种用于测量精密复杂表面的瞬时、高分辨率光学计量技术。这种方法可以对广泛用于半导体封装的透明膜结构器件进行无损检测。我们在本文中建议使用具有逐行光谱校准、相移算法和单波数方法的自制 WLDI 系统，用于高精度、同时测量表面轮廓和薄膜厚度。逐行校准方法通过校准二维探测器每条线上的波数和像素位置之间的关系，通过校正光学系统引起的光谱失真来提高测量精度。而且，频谱信号相位是通过相移算法而不是傅里叶变换方法获得的。通过引入条纹阶次将单波数法应用于计算过程，测量结果表明它增强了系统对环境噪声的抗扰度。测量了 1.806 微米高的标准台阶和 1052.2 纳米厚的标准薄膜，以验证系统性能，并表明该系统具有高度的准确性和可靠性。