In this paper, indium oxide (In₂O₃) and platinum (Pt) are selected as thermoelectric materials to form a kind of temperature sensor. The thermoelectric property of In₂O₃ is optimized by heat treatment that the Seebeck coefficient is greatly increased with the increase of heat treatment time at 200°C. The sensitivity of the flexible thin film thermocouples combined with Pt increased from -40.43μV/°C to -176.06μV/°C with the same temperature difference between hot junction and cold junctions, increasing by 4.35 times. The treated flexible Pt/In₂O₃ TFTCs based on polyimide exhibits a maximum output voltage of 34.33mV and an ultra-high sensitivity of 204.35μV/°C, which is one of the highest values reported for thermocouples deposited onto flexible substrate in the low temperature measurement. In repeatability test and stability test, the sensor also shows great characteristics in repeatability, stability and the temperature drift. In practical manipulator measurement, it can realize accurate measurement of the temperature of the measured object, which has an excellent application prospect of industrial robot and biomedicine.

本文选择氧化铟（In ₂ O ₃）和铂（Pt）作为热电材料，构成一种温度传感器。通过热处理使In ₂ O ₃的热电特性最佳化，塞贝克系数随着200℃下热处理时间的增加而大大增加。柔性薄膜热电偶与Pt结合使用的灵敏度从-40.43μV/°C升高至-176.06μV/°C，而热结点和冷结点之间的温差相同，增加了4.35倍。经处理的柔性Pt / In ₂ O ₃基于聚酰亚胺的TFTC表现出34.33mV的最大输出电压和204.35μV/°C的超高灵敏度，这是低温测量中沉积在柔性基板上的热电偶的最高记录值之一。在重复性测试和稳定性测试中，该传感器在重复性，稳定性和温度漂移方面也显示出出色的特性。在实际的机械手测量中，可以实现对被测物体温度的精确测量，具有工业机器人和生物医学的优良应用前景。