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Automation of the Measurement Process of the Parameters of the Sensitive Elements of the Gas Flow Rate Sensors
Russian Microelectronics Pub Date : 2020-03-10 , DOI: 10.1134/s1063739719070126
V. T. Ryabov , N. A. Djuzhev , D. V. Novikov

Abstract

The study of the characteristics and errors of sensors is as difficult as designing and manufacturing them. The operation of sensors needs to be accurately studied in order to correct the design of sensor models accurately carry out the initial calibration of the ready-made sensors. The stand for investigating the sensitive elements of the gas flow rate sensors, in which the hot-wire anemometric and the calorimetric measurement modes are used, is described. It is shown that the facilities of the automatic control of the gas flow rate and dynamic recording of the measurement results make it possible to process and record the results in millisecond time intervals, investigate the operation of sensitive elements in the pulse mode, and simulate the operation of a microprocessor-based signal processing circuit at the hardware and software levels. The proposed stand makes it possible to take measurements at different gas temperatures and ambient temperatures ranging from –40 to 60°С and control the atmospheric pressure, and it makes it possible to specify the gas flow rate within 0–119 L/min. The considered stand is designed to develop compact sensors of the natural gas flow rate, which could replace the diaphragm flowmeters of the G1.6, G2.5, and G4 series. The stand makes it possible to carry out the comprehensive measurements of sensors in one place and considerably reduces the time of testing the developed converters.


中文翻译:

气体流量传感器敏感元件参数测量过程的自动化

摘要

研究传感器的特性和误差与设计和制造传感器一样困难。需要正确地研究传感器的操作,以便正确地校正传感器模型的设计,从而对现成的传感器进行初始校准。描述了用于研究气体流速传感器的敏感元件的支架,其中使用了热线风速和量热测量模式。结果表明,自动控制气体流量和动态记录测量结果的功能使以毫秒为单位的时间间隔处理和记录结果,研究脉冲模式下敏感元件的运行并模拟基于微处理器的信号处理电路在硬件和软件级别的操作。提议的支架可以在–40至60°С范围内的不同气体温度和环境温度下进行测量并控制大气压力,并且可以在0–119 L / min范围内指定气体流量。所考虑的支架设计用于开发紧凑型天然气流量传感器,可以替代G1.6,G2.5和G4系列的隔膜流量计。该支架可以在一处进行传感器的全面测量,并大大减少了测试开发的转换器的时间。所考虑的支架设计用于开发紧凑型天然气流量传感器,可以替代G1.6,G2.5和G4系列的隔膜流量计。该支架可以在一处进行传感器的全面测量,并大大减少了测试开发的转换器的时间。所考虑的支架设计用于开发紧凑型天然气流量传感器,可以替代G1.6,G2.5和G4系列的隔膜流量计。该支架可以在一处进行传感器的全面测量,并大大减少了测试开发的转换器的时间。
更新日期:2020-03-10
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