Abstract Semiconductor devices incorporated into power electronics systems are proven to be highly sensitive to their thermal environment. Thus, temperature measurement is a key concern when it comes to reliability of power modules. Some Thermo-Sensitive Electrical Parameters (TSEPs) are used to evaluate online temperature of semiconductor components, in operating conditions of power converters. However, the accuracy and the reliability of those TSEPs are not yet fully demonstrated. To overcome this drawback, a power instrumented diode was developed with a Resistance Temperature Detector (RTD) sensor integrated on its top metal surface. This validation tool is characterized in this paper under constant power dissipation. The embedded RTD sensor is conditioned in a resistance bridge circuit. A dynamic characterization of a realistic power module is performed through thermal impedance evaluation. A comparative study is carried out to discuss the static and dynamic performances of the RTD sensor and those of a robust and well-known TSEP (Forward voltage drop under low current Vf@Ict).

中文翻译：

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带有铝 RTD 传感器的仪表功率二极管的实现和表征——应用于热阻抗评估

摘要 集成到电力电子系统中的半导体器件已被证明对其热环境高度敏感。因此，当涉及到电源模块的可靠性时，温度测量是一个关键问题。一些热敏电气参数 (TSEP) 用于评估功率转换器工作条件下半导体组件的在线温度。然而，这些 TSEP 的准确性和可靠性尚未得到充分证明。为了克服这个缺点，开发了一种功率仪表二极管，在其顶部金属表面集成了一个电阻温度检测器 (RTD) 传感器。该验证工具在本文中的特点是在恒定功耗下。嵌入式 RTD 传感器在电阻桥电路中进行调节。实际电源模块的动态特性是通过热阻抗评估来执行的。进行了一项比较研究，以讨论 RTD 传感器的静态和动态性能以及稳健且众所周知的 TSEP（低电流 Vf@Ict 下的正向压降）的静态和动态性能。