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Fabrication of surface microstructures by mask electrolyte jet machining
International Journal of Machine Tools and Manufacture ( IF 14.0 ) Pub Date : 2019-10-18 , DOI: 10.1016/j.ijmachtools.2019.103471
Ming Wu , Jiangwen Liu , Junfeng He , Xiaolei Chen , Zhongning Guo

This paper presents a novel electrochemical processing technique, mask electrolyte jet machining (MEJM), for the fabrication of surface microstructures. MEJM combines jet electrochemical micromachining (Jet-ECM) and through-mask electrochemical micromachining (TMEMM), combining the advantages of TMEMM, which is a high-throughput process, and of Jet-ECM, with its adjustable flow field. The effects of a mobile nozzle on electrolyte flow are investigated, and a new modeling approach for large translational movements is proposed. An analysis of the accuracy and reliability of the proposed method is presented. Microprotrusions and microdimples are produced to high precision and with excellent consistency of dimensional variation (maximum standard deviation 2.171 μm). The results suggest the possibility of an affordable technique for batch fabrication of surface microstructures with high efficiency and precision.



中文翻译:

通过掩膜电解液喷射加工制造表面微结构

本文提出了一种新型的电化学处理技术,即掩模电解质喷射加工(MEJM),用于制造表面微结构。MEJM结合了喷射电化学微加工(Jet-ECM)和穿透掩模电化学微加工(TMEMM),并结合了高通量工艺TMEMM和Jet-ECM的优势,并具有可调节的流场。研究了移动喷嘴对电解液流动的影响,并提出了一种用于大平移运动的新建模方法。对该方法的准确性和可靠性进行了分析。微凸出物和微凹痕的生产具有很高的精度,并且具有出色的尺寸变化一致性(最大标准偏差2.171 μm)。结果表明,有可能以可承受的技术批量生产具有高效率和精度的表面微结构。

更新日期:2019-10-18
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