Intriguing mechanical properties of two-dimensional (2D) atomically thin materials make them well suit for a new class of resonant NEMS. Resonant 2D NEMS show high fundamental frequencies, outstanding tenability and broad dynamic range due to the ultrahigh strength, ultralow mass density and ultrahigh strain stretchability. Recent work toward exploring fabrication and transduction techniques, device performances and the nonlinear dynamic characteristics of 2D NEMS are summed up. Nonlinear dynamic behaviors including nonlinear mode coupling, nonlinear damping and nonlinear pull-in instability are reported in 2D NEMS.

中文翻译：

---

二维材料的共振纳米机电系统

二维（2D）原子薄材料的引人入胜的机械性能使其非常适合新型共振NEMS。共振2D NEMS由于具有超高强度，超低质量密度和超高应变拉伸性，因此具有较高的基频，出色的延展性和宽广的动态范围。总结了探索制造和转导技术，器件性能和2D NEMS的非线性动力学特性的最新工作。二维NEMS中报告了非线性动力学行为，包括非线性模式耦合，非线性阻尼和非线性引入不稳定性。