This work presents a monolithically integrated CMOS-MEMS capacitive accelerometer that uses background self-calibration in analog mode to compensate for sensor offset. Background analog calibration maintains sensor accuracy at all times, thus improving upon traditional digital calibration methods. When powered on, the calibration process automatically initiates without the need for an external controller like a microcontroller. The design requires no physical trimming techniques on the MEMS structure, and the worst zero-gram offset can be reduced to ±50 ​mg. The single-axis accelerometer was fabricated by the UMC 0.18 ​μm CMOS-MEMS process. The chip area containing the sensors and the integrated circuit is 1.94 ​mm ​× ​1.23 ​mm. Within the sensing range of ±8 ​g, the measured output noise density is around 100 μg/rtHz. This total power consumption from the 1.8 ​V supply voltage is 45 ​μW.

这项工作提出了一种单片集成的CMOS-MEMS电容式加速度计，它在模拟模式下使用背景自校准来补偿传感器失调。后台模拟校准始终保持传感器的准确性，从而改进了传统的数字校准方法。开机后，校准过程会自动启动，而无需外部控制器（如微控制器）。该设计在MEMS结构上不需要物理修整技术，最坏的零克偏移可以降低到±50 mg。单轴加速度计是通过UMC 0.18μmCMOS-MEMS工艺制造的。包含传感器和集成电路的芯片面积为1.94毫米×1.23毫米。在±8 g的感应范围内，测得的输出噪声密度约为100μg/ rtHz。