当前位置: X-MOL 学术Mater. Chem. Phys. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
Seedless growth of two-dimensional disc-shaped WS2 layers by chemical vapor deposition
Materials Chemistry and Physics ( IF 4.6 ) Pub Date : 2021-01-01 , DOI: 10.1016/j.matchemphys.2020.123837
Mohammad Reza Rahmani Taji Boyuk , Hajar Ghanbari , Abdolreza Simchi , Ali Maghsoumi

Abstract Chemical processing of two-dimensional (2D) transition metal dichalcogenides has attracted immense attention due to their unique optical, electrical, and catalytic properties. In this paper, we show that under special conditions during seedless chemical vapor deposition (CVD), it is possible to grow large-area 2D WS2 layers with disc-shaped morphology, which has been scarcely reported. Detailed characterizations of the CVD-grown layers by Raman spectroscopy, atomic force microscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy have revealed that a gradient in the precursor concentration in the gas phase and strain energy in the deposited hexagonal clusters favor disc-shaped growth of the 2D metal sulfide. The formation of large-area films with few millimeters in the lateral direction is also feasible by the continuation of the process. Herein, barriers against edge diffusion facilitate symmetric growth on the nucleates to develop ultrathin and large-area films. The process is attractive for the fabrication of optoelectronic devices by 2D semiconductor materials.

中文翻译:

化学气相沉积二维圆盘状 WS2 层的无籽生长

摘要 二维 (2D) 过渡金属二硫属化物的化学加工由于其独特的光学、电学和催化性能而引起了极大的关注。在本文中,我们展示了在无籽化学气相沉积 (CVD) 过程中的特殊条件下,可以生长具有盘状形态的大面积 2D WS2 层,这几乎没有报道。通过拉曼光谱、原子力显微镜、透射电子显微镜和 X 射线光电子能谱对 CVD 生长层的详细表征表明,气相中前体浓度的梯度和沉积的六边形团簇中的应变能有利于圆盘-二维金属硫化物的形状生长。通过继续该过程,在横向上形成几毫米的大面积薄膜也是可行的。在此,防止边缘扩散的障碍促进了成核上的对称生长,以开发超薄和大面积薄膜。该工艺对于通过二维半导体材料制造光电器件具有吸引力。
更新日期:2021-01-01
down
wechat
bug