This paper theoretically and experimentally demonstrates the temperature drift suppression capability of a mode-localized accelerometer based on three degree of freedom weakly coupled resonators. The theoretical model of the temperature characteristics of the amplitude ratio and frequency of the mode-localized accelerometer under the influence of Young’s modulus were established. The effect of the temperature on the input conversion mechanism and weakly coupled resonators are both included in the model. The simulation results show that thermal stress is the main factor affecting the output metric of the mode-localized accelerometer with mechanical coupling beam and, consequently, a stress relief structure is proposed to suppress the effect of stress on the output metric. Compared with the mode-localized accelerometer without stress relief structure, the temperature coefficients of sensitivity and two output metrics of the accelerometer with the stress relief structure are both suppressed by one order of magnitude via the simulation and experiment verification from 30°C to 60°C. And the temperature suppression coefficient of amplitude ratio is improved by 43.9 times than that of the frequency which shows that the mode-localized accelerometer based on amplitude ratio has an excellent temperature drift suppression capability.

中文翻译：

---

一种具有自温漂移抑制功能的模式局域谐振加速度计

本文从理论上和实验上证明了基于三自由度弱耦合谐振器的模式局域加速度计的温度漂移抑制能力。建立了杨氏模量影响下模域加速度计幅值比和频率温度特性的理论模型。温度对输入转换机制和弱耦合谐振器的影响都包含在模型中。仿真结果表明，热应力是影响带机械耦合梁的模式局域加速度计输出度量的主要因素，因此，提出了一种应力消除结构来抑制应力对输出度量的影响。与无应力消除结构的模式局域加速度计相比，具有应力消除结构的加速度计的灵敏度温度系数和两个输出指标通过30°C至60°的仿真和实验验证均被抑制了一个数量级C。幅比的温度抑制系数比频率提高了43.9倍，表明基于幅比的模域加速度计具有良好的温度漂移抑制能力。